I. Uses – Nitrogen Runs Through Every Step of Chip Manufacturing

◆ Protective Gas: In high-temperature processes such as CVD, thermal oxidation, and diffusion, nitrogen creates an oxygen-free protective atmosphere to prevent unwanted oxidation of silicon wafers. It also provides positive-pressure protection for core equipment like lithography machines, blocking particulate contaminants from entering.

◆ Purge Gas: After acid/base treatments, high-purity nitrogen is used to purge wafer surfaces to remove residues. Wafer transfer containers (FOUPs) are purged with high-purity nitrogen to reduce internal oxygen concentration to the ppm level, ensuring wafer cleanliness during transfer and temporary storage.

◆ Carrier Gas: In thin-film deposition processes, nitrogen delivers precursor gases uniformly to the reaction chamber, ensuring consistency in film thickness and composition. Nitrogen consumption at large wafer fabs can reach up to 50,000 m³ per hour.

II. On-Site Nitrogen Generation – A Better Choice

◆ Purity Assurance: Jingqi's patented variable‑path stepwise equalization process decomposes a single pressure equalization step into multiple stages, sequentially balancing oxygen concentration gradients. Combined with a large‑flange structure and the "snowstorm" molecular sieve packing technique, the sieve bed achieves extreme compaction and remains free from pulverization over the long term.

◆ Continuous Stability: High-purity nitrogen at 5N grade or above is highly sensitive to production fluctuations. Jingqi nitrogen generators employ real-time online monitoring, with alarms triggered immediately upon any abnormality in key parameters such as purity and pressure.

◆ Long-Term Economy: Featuring ultra‑first‑class energy‑efficient air compressors and high‑performance CMS, the system reduces overall energy consumption by over 30% compared to traditional designs, ensuring stable and controllable gas costs throughout the entire lifecycle.

Jingqi has provided high‑purity on‑site nitrogen generation solutions for semiconductor companies such as Changchun Changguang Zhengyuan Microelectronics, with equipment operating stably for many years. Bulk applications at leading electronics manufacturers including Foxconn and Shenghong Technology further validate the reliability of Jingqi's technology.

If your production line is struggling with nitrogen purity, supply stability, or long‑term costs, feel free to contact Jingqi for a customized high‑purity on‑site nitrogen generation solution.